Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6517992 | N-sulfonyloxyimide compound and radiation-sensitive resin composition using the same | Yong Wang, Eiichi Kobayashi, Jun Numata, Tsutomu Shimokawa | 2003-02-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6517992 | N-sulfonyloxyimide compound and radiation-sensitive resin composition using the same | Yong Wang, Eiichi Kobayashi, Jun Numata, Tsutomu Shimokawa | 2003-02-11 |