Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6627543 | Low-temperature sputtering system and method for salicide process | Wanqing Cao, Guo-Qiang Lo, Shih-Ked Lee, Robert B. Hixson | 2003-09-30 |
| 6548418 | Dual layer etch stop barrier | Chung H. Lam, Francis R. White | 2003-04-15 |