Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6627543 | Low-temperature sputtering system and method for salicide process | Wanqing Cao, Guo-Qiang Lo, Robert B. Hixson, Eric Lee | 2003-09-30 |
| 6566236 | Gate structures with increased etch margin for self-aligned contact and the method of forming the same | Tsengyou Syau, Guo-Qiang Lo, Chuen-Der Lien, Sang-Yun Lee, Ching-Kai Lin | 2003-05-20 |
| 6534414 | Dual-mask etch of dual-poly gate in CMOS processing | Kuilong Wang, Tsengyou Syau, Chuen-Der Lien | 2003-03-18 |