Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6662654 | Z-axis accelerometer | Yubo Miao, Ranganathan Nagarajan, Rakesh Kumar, Qinxin Zhang | 2003-12-16 |
| 6621135 | Microrelays and microrelay fabrication and operating methods | Quanbo Zou | 2003-09-16 |
| 6571628 | Z-axis accelerometer | Yubo Miao, Ranganathan Nagarajan, Rakesh Kumar, Zhang Qingxin | 2003-06-03 |
| 6573154 | High aspect ratio trench isolation process for surface micromachined sensors and actuators | Ranganathan Nagarajan, Yu Miao, Yi-Nan Su | 2003-06-03 |
| 6521447 | Miniaturized thermal cycler | Quanbo Zou, Yu Chen, Tit Meng Lim, Emmanuel Selvanayagam Zachariah, Tie Yan | 2003-02-18 |
| 6509186 | Miniaturized thermal cycler | Quanbo Zou, Yu Chen, Tit Meng Lim, Emmanuel Selvanayagam Zachariah, Tie Yan | 2003-01-21 |
| 6503847 | Room temperature wafer-to-wafer bonding by polydimethylsiloxane | Yu Chen, Quanbo Zou, Pang Dow Foo | 2003-01-07 |