Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6662654 | Z-axis accelerometer | Yubo Miao, Uppili Sridhar, Rakesh Kumar, Qinxin Zhang | 2003-12-16 |
| 6571628 | Z-axis accelerometer | Yubo Miao, Uppili Sridhar, Rakesh Kumar, Zhang Qingxin | 2003-06-03 |
| 6573154 | High aspect ratio trench isolation process for surface micromachined sensors and actuators | Uppili Sridhar, Yu Miao, Yi-Nan Su | 2003-06-03 |
| 6551937 | Process for device using partial SOI | Cai Jun, Ren Chang Hong, Narayanan Balasubramanian, Yung Chii Liang | 2003-04-22 |