Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6573154 | High aspect ratio trench isolation process for surface micromachined sensors and actuators | Uppili Sridhar, Ranganathan Nagarajan, Yi-Nan Su | 2003-06-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6573154 | High aspect ratio trench isolation process for surface micromachined sensors and actuators | Uppili Sridhar, Ranganathan Nagarajan, Yi-Nan Su | 2003-06-03 |