Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656376 | Process for cleaning CVD units | Elke Fritsch, Christine Dehm, Hermann Wendt | 2003-12-02 |
| 6649483 | Method for fabricating a capacitor configuration | Walter Hartner, Matthias Kronke | 2003-11-18 |
| 6649424 | Method for fabricating an integrated semiconductor circuit having a strongly polarizable dielectric or ferroelectric | Manfred Mört, Walter Hartner, Gunther Schindler | 2003-11-18 |
| 6613640 | Method for fabricating an integrated ferroelectric semiconductor memory and integrated ferroelectric semiconductor memory | Ihar Kasko, Matthias Kronke | 2003-09-02 |
| 6593228 | Method of fabricating a patterned metal-containing layer on a semiconductor wafer | Gerhard Beitel, Andreas Hauser, Peter Bosk | 2003-07-15 |
| 6586348 | Method for preventing etching-induced damage to a metal oxide film by patterning the film after a nucleation anneal but while still amorphous and then thermally annealing to crystallize | Walter Hartner, Gunther Schindler, Frank Hintermaier | 2003-07-01 |
| 6566220 | Method for fabricating a semiconductor memory component | Manfred Engelhardt, Franz Kreupl, Manuela Schiele | 2003-05-20 |
| 6537900 | Method for patterning a metal or metal silicide layer and a capacitor structure fabricated by the method | Carlos Mazure-Espejo, Gunther Schindler | 2003-03-25 |
| 6503792 | Method for fabricating a patterned metal-oxide-containing layer | Walter Hartner, Gunther Schindler, Mattias Ahlstedt | 2003-01-07 |