Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669857 | Process for etching bismuth-containing oxide films | — | 2003-12-30 |
| 6605505 | Process for producing an integrated semiconductor memory configuration | Carlos Mazure-Espejo | 2003-08-12 |
| 6586348 | Method for preventing etching-induced damage to a metal oxide film by patterning the film after a nucleation anneal but while still amorphous and then thermally annealing to crystallize | Walter Hartner, Gunther Schindler, Volker Weinrich | 2003-07-01 |
| 6527848 | Complex of an element of transition group IV or V for forming an improved precursor combination | Ralf Metzger, Christoph Werner | 2003-03-04 |