Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670668 | Microelectronic structure, method for fabricating it and its use in a memory cell | — | 2003-12-30 |
| 6656376 | Process for cleaning CVD units | Elke Fritsch, Christine Dehm, Volker Weinrich | 2003-12-02 |
| 6614575 | Optical structure and method for producing the same | Ulrike Gruning, Volker Lehmann, Reinhard Stengl, Hans Reisinger | 2003-09-02 |
| 6573542 | Capacitor electrodes arrangement with oxygen iridium between silicon and oxygen barrier layer | Rainer Bruchhaus, Nicolas Nagel, Igor Kasko, Robert Primig | 2003-06-03 |
| 6558770 | Perforated work piece, and method for producing it | Volker Lehmann, Hans Reisinger, Reinhard Stengel, Gerrit Lange, Stefan Ottow | 2003-05-06 |
| 6552385 | DRAM memory capacitor having three-layer dielectric, and method for its production | Gerhard Beitel, Martin Franosch, Thomas Haneder, Gerrit Lange, Hans Reisinger +2 more | 2003-04-22 |
| 6548846 | Storage capacitor for a DRAM | Hans Reisinger, Volker Lehmann, Reinhard Stengl, Gerrit Lange, Harald Bachhofer +2 more | 2003-04-15 |