Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6551874 | Self-aligned STI process using nitride hard mask | John Pohl, Veit Klee, Tobias Mono, Paul Schroeder | 2003-04-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6551874 | Self-aligned STI process using nitride hard mask | John Pohl, Veit Klee, Tobias Mono, Paul Schroeder | 2003-04-22 |