Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6579149 | Support and alignment device for enabling chemical mechanical polishing rinse and film measurements | Richard J. Lebel, Frederic Maurer, Rock Nadeau, Paul Smith, Hemantha K. Wickramasinghe | 2003-06-17 |
| 6567172 | System and multipass probe for optical interference measurements | Philip Charles Danby Hobbs, Richard J. Lebel, Martin P. O'Boyle, Hemantha K. Wickramasinghe | 2003-05-20 |