Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6579149 | Support and alignment device for enabling chemical mechanical polishing rinse and film measurements | Frederic Maurer, Rock Nadeau, Paul Smith, Hemantha K. Wickramasinghe, Theodore G. van Kessel | 2003-06-17 |
| 6567172 | System and multipass probe for optical interference measurements | Philip Charles Danby Hobbs, Martin P. O'Boyle, Theodore G. van Kessel, Hemantha K. Wickramasinghe | 2003-05-20 |