Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6579149 | Support and alignment device for enabling chemical mechanical polishing rinse and film measurements | Richard J. Lebel, Frederic Maurer, Rock Nadeau, Hemantha K. Wickramasinghe, Theodore G. van Kessel | 2003-06-17 |