Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667467 | Microprobe and scanning probe apparatus having microprobe | Nobuhiro Shimizu, Hiroshi Takahashi, Yoshiharu Shirakawabe, Walter Haberle, Gerd Binnig +1 more | 2003-12-23 |