Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667467 | Microprobe and scanning probe apparatus having microprobe | Nobuhiro Shimizu, Hiroshi Takahashi, Yoshiharu Shirakawabe, Jürgen Brugger, Walter Haberle +1 more | 2003-12-23 |
| 6628452 | Optical devices | Walter Haeberle, Gian-Luca Bona, Peter Vettiger | 2003-09-30 |
| 6588932 | Air bearing between a first and second object | Walter Haeberle | 2003-07-08 |