Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667205 | Method of forming retrograde n-well and p-well | Matthew J. Breitwisch, Chung H. Lam | 2003-12-23 |
| 6649429 | In-line electrical monitor for measuring mechanical stress at the device level on a semiconductor wafer | Edward D. Adams, Arne Ballantine, Richard S. Kontra, Alain Loiseau | 2003-11-18 |
| 6552411 | DC or AC electric field assisted anneal | Arne Ballantine, John J. Ellis-Monaghan, Toshihura Furukawa, Jeffrey D. Gilbert, Glenn R. Miller | 2003-04-22 |
| 6531379 | High resolution dopant/impurity incorporation in semiconductors via a scanned atomic force probe | Toshiharu Furukawa, John J. Ellis-Monaghan | 2003-03-11 |
| 6514840 | Micro heating of selective regions | Howard T. Barrett, Toshiharu Furukawa, Donald W. Rakowski | 2003-02-04 |