Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670624 | Ion implanter in-situ mass spectrometer | Edward P. Lowe, Jr., Nicholas Mone, Jr., Donald W. Rakowski, Richard S. Ray | 2003-12-30 |
| 6649429 | In-line electrical monitor for measuring mechanical stress at the device level on a semiconductor wafer | Arne Ballantine, Richard S. Kontra, Alain Loiseau, James A. Slinkman | 2003-11-18 |