Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663468 | Method for polishing surface of semiconductor device substrate | Kan Yasui, Masahiko Sato, Souichi Katagiri, Masayuki Nagasawa, Kunio Harada +2 more | 2003-12-16 |
| 6612912 | Method for fabricating semiconductor device and processing apparatus for processing semiconductor device | Kan Yasui, Souichi Katagiri, Shigeo Moriyama, Ryousei Kawai, Sadayuki Nishimura +1 more | 2003-09-02 |
| 6589871 | Processing method, measuring method and producing method of semiconductor devices | Souichi Katagiri, Kan Yasui, Masayuki Nagasawa, Ui Yamaguchi | 2003-07-08 |
| 6565424 | Method and apparatus for planarizing semiconductor device | Souichi Katagiri, Kan Yasui, Masayuki Nagasawa, Ui Yamaguchi | 2003-05-20 |
| 6524961 | Semiconductor device fabricating method | Souichi Katagiri, Kan Yasui, Ryousei Kawai, Sadayuki Nishimura, Masahiko Sato +1 more | 2003-02-25 |