Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663468 | Method for polishing surface of semiconductor device substrate | Yoshio Kawamura, Kan Yasui, Masahiko Sato, Souichi Katagiri, Masayuki Nagasawa +2 more | 2003-12-16 |
| 6589871 | Processing method, measuring method and producing method of semiconductor devices | Yoshio Kawamura, Souichi Katagiri, Kan Yasui, Masayuki Nagasawa | 2003-07-08 |
| 6565424 | Method and apparatus for planarizing semiconductor device | Souichi Katagiri, Yoshio Kawamura, Kan Yasui, Masayuki Nagasawa | 2003-05-20 |