Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6612912 | Method for fabricating semiconductor device and processing apparatus for processing semiconductor device | Kan Yasui, Souichi Katagiri, Yoshio Kawamura, Ryousei Kawai, Sadayuki Nishimura +1 more | 2003-09-02 |
| 6591207 | Semiconductor production system | Hidemitsu Naya, Rikio Tomiyoshi, Mutsumi Kikuchi, Kotaro Shimamura | 2003-07-08 |
| 6524961 | Semiconductor device fabricating method | Souichi Katagiri, Kan Yasui, Ryousei Kawai, Sadayuki Nishimura, Masahiko Sato +1 more | 2003-02-25 |