Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6548847 | SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE HAVING A FIRST WIRING STRIP EXPOSED THROUGH A CONNECTING HOLE, A TRANSITION-METAL FILM IN THE CONNECTING HOLE AND AN ALUMINUM WIRING STRIP THEREOVER, AND A TRANSITION-METAL NITRIDE FILM BETWEEN THE ALUMINUM WIRING STRIP AND THE TRANSITION-METAL FILM | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 2003-04-15 |
| 6537415 | Apparatus for processing samples | Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +5 more | 2003-03-25 |
| 6537417 | Apparatus for processing samples | Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +5 more | 2003-03-25 |
| 6526330 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Minoru Soraoka, Ken Yoshioka | 2003-02-25 |
| 6519504 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Minoru Soraoka, Ken Yoshioka | 2003-02-11 |