Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6526330 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Ken Yoshioka, Yoshinao Kawasaki | 2003-02-25 |
| 6519504 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Ken Yoshioka, Yoshinao Kawasaki | 2003-02-11 |