Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638854 | Semiconductor device and method for manufacturing the same | Yoshio Homma, Noriyuki Sakuma, Naofumi Ohashi, Toshinori Imai, Hizuru Yamaguchi +1 more | 2003-10-28 |
| 6596638 | Polishing method | Yoshio Homma, Noriyuki Sakuma, Kenichi Takeda, Kenji Hinode | 2003-07-22 |
| 6565422 | Polishing apparatus using substantially abrasive-free liquid with mixture unit near polishing unit, and plant using the polishing apparatus | Yoshio Homma, Hiroki Nezu, Takeshi Kimura, Noriyuki Sakuma | 2003-05-20 |
| 6562719 | Methods of polishing, interconnect-fabrication, and producing semiconductor devices | Noriyuki Sakuma, Yoshio Homma | 2003-05-13 |
| 6561883 | Method of polishing | Noriyuki Sakuma, Yoshio Homma | 2003-05-13 |
| 6531400 | Process for manufacturing semiconductor integrated circuit device | Naofumi Ohashi, Junji Noguchi, Toshinori Imai, Hizuru Yamaguchi, Nobuo Owada +2 more | 2003-03-11 |
| 6525336 | Superfine electronic device and method for making same | Yasuo Wada, Tsuyoshi Uda, Tokuo Kure, Tsuneo Ichiguchi, Shinji Okazaki +1 more | 2003-02-25 |
| 6509273 | Method for manufacturing a semiconductor device | Toshinori Imai, Naofumi Ohashi, Yoshio Homma | 2003-01-21 |