Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6565422 | Polishing apparatus using substantially abrasive-free liquid with mixture unit near polishing unit, and plant using the polishing apparatus | Yoshio Homma, Takeshi Kimura, Seiichi Kondo, Noriyuki Sakuma | 2003-05-20 |