Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638854 | Semiconductor device and method for manufacturing the same | Yoshio Homma, Seiichi Kondo, Naofumi Ohashi, Toshinori Imai, Hizuru Yamaguchi +1 more | 2003-10-28 |
| 6596638 | Polishing method | Seiichi Kondo, Yoshio Homma, Kenichi Takeda, Kenji Hinode | 2003-07-22 |
| 6565422 | Polishing apparatus using substantially abrasive-free liquid with mixture unit near polishing unit, and plant using the polishing apparatus | Yoshio Homma, Hiroki Nezu, Takeshi Kimura, Seiichi Kondo | 2003-05-20 |
| 6561875 | Apparatus and method for producing substrate with electrical wire thereon | Yoshio Homma, Naofumi Ohashi, Toshinori Imai | 2003-05-13 |
| 6561883 | Method of polishing | Seiichi Kondo, Yoshio Homma | 2003-05-13 |
| 6562719 | Methods of polishing, interconnect-fabrication, and producing semiconductor devices | Seiichi Kondo, Yoshio Homma | 2003-05-13 |