Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6607991 | Method for curing spin-on dielectric films utilizing electron beam radiation | Matthew Ross, Anthony L. Rubiales, Heike Thompson, Selmer Wong, Trey Marlowe +1 more | 2003-08-19 |