Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6607991 | Method for curing spin-on dielectric films utilizing electron beam radiation | William R. Livesay, Anthony L. Rubiales, Heike Thompson, Selmer Wong, Trey Marlowe +1 more | 2003-08-19 |
| 6582777 | Electron beam modification of CVD deposited low dielectric constant materials | Heike Thompson, Jingjun Yang | 2003-06-24 |
| 6551926 | Electron beam annealing of metals, alloys, nitrides and silicides | — | 2003-04-22 |
| 6548899 | Method of processing films prior to chemical vapor deposition using electron beam processing | — | 2003-04-15 |