Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6607991 | Method for curing spin-on dielectric films utilizing electron beam radiation | William R. Livesay, Matthew Ross, Anthony L. Rubiales, Selmer Wong, Trey Marlowe +1 more | 2003-08-19 |
| 6582777 | Electron beam modification of CVD deposited low dielectric constant materials | Matthew Ross, Jingjun Yang | 2003-06-24 |