Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6652650 | Modified susceptor for use in chemical vapor deposition process | Charles C. Yang | 2003-11-25 |
| 6596095 | Epitaxial silicon wafer free from autodoping and backside halo and a method and apparatus for the preparation thereof | Michael J. Ries, Charles C. Yang | 2003-07-22 |