Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6666915 | Method for the preparation of an epitaxial silicon wafer with intrinsic gettering | Darrell D. Watkins, Jr. | 2003-12-23 |
| 6652650 | Modified susceptor for use in chemical vapor deposition process | Robert W. Standley | 2003-11-25 |
| 6599815 | Method and apparatus for forming a silicon wafer with a denuded zone | — | 2003-07-29 |
| 6596095 | Epitaxial silicon wafer free from autodoping and backside halo and a method and apparatus for the preparation thereof | Michael J. Ries, Robert W. Standley | 2003-07-22 |
| 6537655 | Epitaxial silicon wafer with intrinsic gettering and a method for the preparation thereof | Gregory M. Wilson, Jon Rossi | 2003-03-25 |