Issued Patents 2003
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6515945 | Recording media library apparatus with a function to detect a position of a recording medium transferred in the library | Takayuki Komiya, Katsumasa Yokoyama, Hitoshi Kimura | 2003-02-04 |
| 6509564 | WORKPIECE HOLDER, SEMICONDUCTOR FABRICATING APPARATUS, SEMICONDUCTOR INSPECTING APPARATUS, CIRCUIT PATTERN INSPECTING APPARATUS, CHARGED PARTICLE BEAM APPLICATION APPARATUS, CALIBRATING SUBSTRATE, WORKPIECE HOLDING METHOD, CIRCUIT PATTERN INSPECTING METHOD, AND CHARGED PARTICLE BEAM APPLICATION METHOD | Hiroyuki Shinada, Atsuko Takafuji, Yasutsugu Usami, Shuji Sugiyama | 2003-01-21 |