SY

Shoji Yoshikawa

EB Ebara: 1 patents #78 of 257Top 35%
Mitsubishi Electric: 1 patents #775 of 2,499Top 35%
NI Nikon: 1 patents #120 of 325Top 40%
Overall (2003): #42,858 of 273,478Top 20%
2
Patents 2003

Issued Patents 2003

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6593152 Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Mamoru Nakasuji, Tohru Satake, Kenji Watanabe, Takeshi Murakami, Nobuharu Noji +9 more 2003-07-15
6523786 Apparatus for determining attitude of artificial satellite Katsuhiko Yamada, Haruhiko Shimoji, Masao Inoue, Norimasa Yoshida, Katsumasa Miyatake 2003-02-25