Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6614534 | Method and apparatus for combined measurement of surface non-uniformity index of refraction variation and thickness variation | Michael A. Marcus, Jiann-Rong Lee, Thomas F. Kaltenbach | 2003-09-02 |