Issued Patents 2003
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653206 | Method and apparatus for processing composite member | Kazuaki Ohmi, Kiyofumi Sakaguchi, Hirokazu Kurisu | 2003-11-25 |
| 6653205 | Composite member separating method, thin film manufacturing method, and composite member separating apparatus | Kazuaki Ohmi, Kiyofumi Sakaguchi | 2003-11-25 |
| 6629539 | Sample processing system | Kazuaki Ohmi, Kiyofumi Sakaguchi | 2003-10-07 |
| 6624047 | Substrate and method of manufacturing the same | Kiyofumi Sakaguchi, Kazuaki Ohmi | 2003-09-23 |
| 6609446 | Separating apparatus, separating method, and method of manufacturing semiconductor substrate | Kazuaki Ohmi, Takao Yonehara, Kiyofumi Sakaguchi, Hirokazu Kurisu | 2003-08-26 |
| 6609553 | Sample processing apparatus and method | Takao Yonehara, Kazuaki Omi, Kiyofumi Sakaguchi | 2003-08-26 |
| 6605518 | Method of separating composite member and process for producing thin film | Kazuaki Ohmi, Katsumi Nakagawa, Nobuhiko Sato, Kiyofumi Sakaguchi, Takao Yonehara | 2003-08-12 |
| 6597039 | Composite member, its separation method, and preparation method of semiconductor substrate by utilization thereof | Kazuaki Ohmi, Kiyofumi Sakaguchi | 2003-07-22 |
| 6540861 | Member separating apparatus and processing apparatus | Kiyofumi Sakaguchi, Takao Yonehara, Kazuaki Omi, Toshikazu Miyakogawa | 2003-04-01 |
| 6527031 | Sample separating apparatus and method, and substrate manufacturing method | Kazuaki Ohmi, Kiyofumi Sakaguchi | 2003-03-04 |
| 6521078 | Sample separating apparatus and method, and substrate manufacturing method | Takao Yonehara, Kazuaki Omi, Kiyofumi Sakaguchi | 2003-02-18 |