Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653206 | Method and apparatus for processing composite member | Kazutaka Yanagita, Kazuaki Ohmi, Kiyofumi Sakaguchi | 2003-11-25 |
| 6609446 | Separating apparatus, separating method, and method of manufacturing semiconductor substrate | Kazuaki Ohmi, Takao Yonehara, Kiyofumi Sakaguchi, Kazutaka Yanagita | 2003-08-26 |