Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6573975 | DUV scanner linewidth control by mask error factor compensation | James Tsacoyeanes | 2003-06-03 |
| 6556281 | Flexible piezoelectric chuck and method of using the same | Jorge Ivaldi | 2003-04-29 |
| 6509952 | Method and system for selective linewidth optimization during a lithographic process | James Tsacoyeanes | 2003-01-21 |