Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6619903 | System and method for reticle protection and transport | Glenn Friedman, Michael DeMarco, James McClay | 2003-09-16 |
| 6559922 | Method and apparatus for a non-contact scavenging seal | Eric Hansell, Jose V. Herrera, Richard L. Huse, Stephen G. Krehley, Thomas P. Shamaly | 2003-05-06 |
| 6556281 | Flexible piezoelectric chuck and method of using the same | Pradeep K. Govil | 2003-04-29 |
| 6507390 | Method and apparatus for a reticle with purged pellicle-to-reticle gap | — | 2003-01-14 |