Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6573975 | DUV scanner linewidth control by mask error factor compensation | Pradeep K. Govil | 2003-06-03 |
| 6509952 | Method and system for selective linewidth optimization during a lithographic process | Pradeep K. Govil | 2003-01-21 |