Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6666979 | Dry etch release of MEMS structures | Jeffrey D. Chinn, Vidyut Gopal, Sofiane Soukane | 2003-12-23 |
| 6576489 | Methods of forming microstructure devices | Jeffrey D. Chinn | 2003-06-10 |