Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6666979 | Dry etch release of MEMS structures | Jeffrey D. Chinn, Vidyut Gopal, Toi Yue Becky Leung | 2003-12-23 |
SS
Sofiane Soukane
Overall (2003): #117,153 of 273,478Top 45%
1
Patents 2003