Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6605319 | Use of integrated polygen deposition and RTP for microelectromechanical systems | Jeffrey D. Chinn, Yi-Hsing Chen, John Christopher Moran | 2003-08-12 |
| 6540466 | Compact apparatus and method for storing and loading semiconductor wafer carriers | — | 2003-04-01 |