Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6605319 | Use of integrated polygen deposition and RTP for microelectromechanical systems | Jeffrey D. Chinn, Yi-Hsing Chen, Robert Z. Bachrach | 2003-08-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6605319 | Use of integrated polygen deposition and RTP for microelectromechanical systems | Jeffrey D. Chinn, Yi-Hsing Chen, Robert Z. Bachrach | 2003-08-12 |