Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6646276 | Ion implantation beam monitor | Simon Povall, Leslie W Lane, Amir Al-Bayati | 2003-11-11 |
| 6633046 | Method and apparatus for detecting that two moveable members are correctly positioned relatively to one another | James Biddle, Ian R. Joyce, James Victor Edwards | 2003-10-14 |
| 6583428 | Apparatus for the backside gas cooling of a wafer in a batch ion implantation system | David J. Chipman, Bryan C. Lagos, Gary J. Rosen, Dale K. Stone | 2003-06-24 |
| 6580082 | System and method for delivering cooling gas from atmospheric pressure to a high vacuum through a rotating seal in a batch ion implanter | — | 2003-06-17 |
| 6566661 | Ion implanter with wafer angle and faraday alignment checking | — | 2003-05-20 |
| 6555825 | Ion implanter | Keith Relleen, Justin Lowe | 2003-04-29 |
| 6525327 | Ion implanter and beam stop therefor | Michael T. Wauk, II, John Ruffell, Hilton F. Glavish, Peter Kindersley | 2003-02-25 |