Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583428 | Apparatus for the backside gas cooling of a wafer in a batch ion implantation system | David J. Chipman, Bryan C. Lagos, Robert J. Mitchell, Dale K. Stone | 2003-06-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583428 | Apparatus for the backside gas cooling of a wafer in a batch ion implantation system | David J. Chipman, Bryan C. Lagos, Robert J. Mitchell, Dale K. Stone | 2003-06-24 |