Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6524969 | High density plasma chemical vapor deposition (HDP-CVD) processing of gallium arsenide wafers | Zhuang Li, Tzuyuan Yiin, Kent Rossman | 2003-02-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6524969 | High density plasma chemical vapor deposition (HDP-CVD) processing of gallium arsenide wafers | Zhuang Li, Tzuyuan Yiin, Kent Rossman | 2003-02-25 |