Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6603269 | Resonant chamber applicator for remote plasma source | Be Van Vo, Salvador P. Umotoy, Son Trinh, Lawrence Chung-Lai Lei, Sergio Edelstein +2 more | 2003-08-05 |
| 6592817 | Monitoring an effluent from a chamber | Tung Bach, Quyen Pham | 2003-07-15 |