Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653231 | Process for reducing the critical dimensions of integrated circuit device features | Chih-Yuh Yang, Jeffrey A. Shields | 2003-11-25 |
| 6630288 | Process for forming sub-lithographic photoresist features by modification of the photoresist surface | Jeffrey A. Shields, Chih-Yuh Yang | 2003-10-07 |
| 6589709 | Process for preventing deformation of patterned photoresist features | Jeffrey A. Shields, Chih-Yuh Yang | 2003-07-08 |
| 6589713 | Process for reducing the pitch of contact holes, vias, and trench structures in integrated circuits | — | 2003-07-08 |
| 6518175 | Process for reducing critical dimensions of contact holes, vias, and trench structures in integrated circuits | — | 2003-02-11 |