Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642152 | Method for ultra thin resist linewidth reduction using implantation | Che-Hoo Ng, Scott A. Bell, Anne E. Sanderfer | 2003-11-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642152 | Method for ultra thin resist linewidth reduction using implantation | Che-Hoo Ng, Scott A. Bell, Anne E. Sanderfer | 2003-11-04 |