Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642152 | Method for ultra thin resist linewidth reduction using implantation | Scott A. Bell, Anne E. Sanderfer, Christopher Lee Pike | 2003-11-04 |
| 6624037 | XE preamorphizing implantation | Matthew S. Buynoski | 2003-09-23 |
| 6514833 | Method of inhibiting lateral diffusion between adjacent wells by introducing carbon or fluorine ions into bottom of STI groove | Emi Ishida | 2003-02-04 |
| 6503801 | Non-uniform channel profile via enhanced diffusion | Richard P. Rouse, Judy Xilin An | 2003-01-07 |