Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6512991 | Method and apparatus for reducing deposition variation by modeling post-clean chamber performance | Allen L. Evans, Craig W. Christian | 2003-01-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6512991 | Method and apparatus for reducing deposition variation by modeling post-clean chamber performance | Allen L. Evans, Craig W. Christian | 2003-01-28 |